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Piezoelectric Analysis of Saw Sensor Using Finite Element Method

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Academic year: 2017

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Fig.  1  shows  geometry  of  SAW  sensor  made  of  piezoelectric  GaN  layer  and  SiC  substrate
Tab. 1 Elastic properties of GaN and SiC  Elastic
Tab. 2 Electric and piezoelectric properties of GaN  electric properties -  relative permitivity [-]  piezoelectric properties   [pC/m 2 ]  e p11 =8.9  e 13 =-0.51  -  e 33 =0.375  -  e 15 =0.67
Fig. 4. shows total deformation of system at the end time of simulation. As we can see from  the figure, the waves  propagate on the surface of the sensor, but some of them propagate also into the  substrate

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