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Composition ratio effect in IGZO using solution combustion synthesis for TFT applications

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Academic year: 2019

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Figure 3.1: FT-IR spectra of IGZO solutions, with di ff erent molar ratios.
Figure 3.2: DSC-TG analysis of IGZO 3:1:1 precursor solutions with 2-ME as solvent and using urea as fuel or not.
Figure 3.4: Transmittance spectra of IGZO thin films on glass substrates.
Figure 3.5: GAXRD di ff ractograms of 3-layer IGZO thin films on Si substrates, with di ff erent molar ratios.
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