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Al-doped ZnO ceramic sputtering targets based on nanocrystalline powders produced by emulsion detonation synthesis – deposition and application as a transparent conductive oxide material

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Academic year: 2019

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Fig. 2.2.  Overview of the main manufacturing methods for metal-oxide nanoparticles (Adapted from  [2] )
Fig. 2.6. Some important dates since the discovery of EDSM in 2003 until the beginning of industrial  production in INNOVNANO plant (2012)
Fig. 2.19. Thin film market share in terms of module production between 2003 and 2020 (Adapted from
Fig. 2.23. Electrical resistivity as a function of oxygen content in AZO ceramic targets (adapted from  [192] )
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