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Label-free detection of biomolecules with Ta2O5 -based field effect devices

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Academic year: 2019

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Figure  2.14. Schematic representation of potential drops along the  ISFED structure. (Shinwari  2007)
Figure  3.4.  AJA  ATC-1300F  sputtering  system  used  for  the  deposition  of  dielectrics  (left)  and  detail of the main chamber (right), showing the magnetrons’ configuration.
Figure 4.6. Frequency dependence of C(V) characteristics (left) and leakage current - I(V) (right)  of an EIS sensor in pH 7 buffer solution.
Figure  4.8  Capacitance-voltage  and  leakage  current  characteristics  of  Al/Si/SiO 2 /Ta 2 O 5   sensor  exposed to electrolytes of pH 4, 7 and 10
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