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[PENDING] Calibration of micro and nanorobotic systems: Contribution of influential parameters to the geometric accuracy

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Academic year: 2024

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Figure 2.2: Structure and dimension errors of the robotic manipulator where ∆H and
Figure 2.6: Three-tier structure of control architecture of microtask platforms.
Figure 2.8: (a) Measurement of stage position by interferometer; (b) Measurement of ambient temperature close to the stage; (c) Measurement of internal sensor of the stage;
Figure 3.1: Positioning accuracy AP and repeatability RP . G is the barycenter of attained positions; O c is the command pose.
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