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TEMPLATE-ASSISTED FABRICATION AND DIELECTROPHORETIC MANIPULATION OF PZT MICROTUBES

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Figure  1.    Fabrication  of  PZT  microtubes  using  vacuum  iniltration  method:  a)  a  pre-cleaned  macroporous  silicon  template,  b) immersing the template into PZT solution under vacuum, c) a layer of PZT formed on the pore walls after pyrolysis a
Figure  4.    SEM  photograph  of  an  ordered  array  of  PZT  mi- mi-crotubes.
Figure 6.  X-ray diffraction pattern of PZT micotubes anchored  at the bottom of the Si template.
Figure  9  shows  an  illustration  of  translation  and  electrorotation  of  PZT  tubes  by  dielectrophoresis,   in-cluding  the  frequency-variation-induced  enhancement  in orientation of the tubes
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