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Mat. Res. vol.9 número1

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Academic year: 2018

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Figure  1.  Schematic  diagram  for  plasma  immersion  ion  implantation  ap- ap-paratus.
Figure 4. a) AFM - sample #4 – PIII (150 minutes); and b) AFM - sample #5  – PIIIP (75 minutes) + NP (240 minutes).

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