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2077-6772/2012/4(2)02023(5) 02023-1 2012 Sumy State University Analytical Modeling of SON MOSFET and Realization Inverter Circuit for

High Speed and Ultra Dense Low Power Circuits

Kousik Naskar*, C.J. Clement Singh, Subir Kumar Sarkar

Department of Electronics & Telecommunication Engineering, Jadavpur University, Kolkata-700032, India

(Received 10 February 2012; published online 04 June 2012)

In the recent years, there has been considerable interest in the realization of high speed, small-size and low-power consuming devices and systems. As a consequence, the search for new principle of operation of the small-size, high speed and low-power device is becoming more and more important. In our earlier paper, it has been established that SON technology, not only improve the dc performance with reduce a short-channel effect and threshold voltage, it also improves the frequency response due to improvement in conductance and reduced parasitic effect. Further, it is already in our knowledge that SCEs are suppressed in dual material gate MOSFETs because of the perceivable step in the surface-potential profile, which screens the drain potential. The concept of dual material gate has been applied to SON MOSFETs struc-ture and the feastruc-tures exhibited by resulting new SON strucstruc-ture has been examined for the first time by developing an analytical model and the result agree well with the MEDICI simulation values. In order to substantiate the merits of the proposed SON MOSFETs, a MOS Inverter is realized using the SON MOSFETs and its performance is investigated as an aid to the high-speed, ultra-dense and low-power cir-cuit related work.

Keywords: SON, SOI, Dual Material Gate, MEDICI, Inverter, Short Channel Effects.

PACS numbers: 84.30. – r, 85.30.De, 85.40.Bh, 85.40.Qx,

______________

*[email protected]

1. INTRODUCTION

Continuous progress in semiconductor technology has enabled the relentless evolution of electronics, in-formation technology and communication [1-3]. It is evi-dent that power consumption, leakage issues, scalability and noise immunity will be the bench mark for future devices in VLSI circuit design. Since the speed of MOSFET is intrinsically limited by the carrier transit time, the most obvious approach to improve the device speed is to reduce the gate length [4-6]. When the gate length is aggressively scaled, the gate begins to lose con-trol over the channel and the parasitic condition results in saturation, possibly in a reduction of transconduct-ance and in an increase of drain conducttransconduct-ance [7-10]. It has already been established that under sub 100 nm regime, conventional MOSFET scaling concepts will be confronted with physical limitations-the lattice constant of Si. The major problems of scaling down the conven-tional MOSFETs include: (a) quantum mechanical tun-nelling through the thin gate oxide, from source to drain and from drain to body; (b) threshold voltage control in-duced by random doping effects; (c) short channel effects (SCE) and mobility degradation; and (d) process control of thin layer uniformity and accurate lithography and implantation. In order to extend the lifetime of the Si-based CMOS technology, devices with new structures and/or new materials need to be considered [11-15]. Sev-eral performance boosters have been proposed in the literature and the International Technology Roadmap for Semiconductor (ITRS) suggest that one or more tech-nology boosters may be required for devices beyond the 45 nm technology node in order to sustain the increase of intrinsic device speed [16]. Continuous down scaling of bulk MOSFET produces strong short channel effects and consequently a high leakage current which limits farther miniaturization of MOSFET [17-20]. Major issue with

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2. MODEL §

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§

2.1 Equivalent Capacitive Model §

ާ﹘締§裔蟠⊰蟠§⬸ §﹘§斜�§䡠�斜Ŷ§裔§裔 ⬸莸§§ ö§nö§ §裔蟠⊰蟠§⊰⬸裔§ § ﹘裔§⬸締§裔⊰⬸§ ×èݧ﹘ö§§Ờ�î§斜î§Ť�ú﹘§﹘§裔蟠§§ § ⊰㘬裔裔§

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§ §

Fig. 1 – Ū⊰蟠§⬸ §斜�§﹘裔§§

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Fig. 2 – §斜�♌ú斜�ð䡠�斜Ŷ§﹘締§裔蟠⊰蟠§

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Fig. 3 – Ŷ䀔蟠﹘§⊰﹘﹘⊰﹘⊰§뀐⬸§

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♌§ö§Đ♄Ờ�§ §裔§ §﹘§⬸ §⊰﹘﹘⊰﹘⊰î§¢§裔§

§⊰﹘﹘⊰﹘⊰§蟠§⬸§裔蟠裔﹘§﹘裔§﹘§♄�§裔§ §

⊰﹘﹘⊰﹘⊰§蟠§⬸§ § î§♄ ×ĆînîĐݧ﹘§ § ﹘⊰§

裔﹘§⊰﹘﹘⊰﹘⊰裔§ ⬸§ § ﹘⊰裔î§ î

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﹘§﹘§ § ⬸§ ﹘⊰§⬸ § §⊰ ﹘§蟠§⬸§﹘›§

裔§ § ﹘§﹘§⬸﹘§﹘§ §⊰ ﹘§﹘⊰㘬§ ﹘⊰§蟠§ ⬸§裔⬸蟠⊰ú﹘§﹘§Đ§裔§ § ﹘§﹘§⬸﹘§﹘§ §

﹘⊰㘬§ ﹘⊰§⬸ § §⊰ ﹘§蟠§⬸§裔蟠裔﹘ö§

2.2 Fringing Field Effect §

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裔締뀐뀐⊰﹘§⬸﹘§裔蟠⬸§§Ť§﹘⬸蟠§ § ⊰ ﹘§⊰§﹘§ 締§⊰﹘§§ 裔裔§﹘裔§ⷌnĮ祜ö§

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§ ĀnĀnĐðЧ

2.3 Channel Lateral Field Effect §

Ū ﹘§ ⊰§﹘﹘§ § ⊰§蟠§⬸§  §﹘§ ﹘裔§蟠⊰§ §§﹘§裔 ⬸§⊰ ﹘§⊰§⊰﹘§§ ⊰⬸⬸﹘§§ § 裔 ⬸§⬸﹘§뀐⬸§ ⬸蟠 §﹘§ 莸§㘬⬸莸§⊰ 䀔蟠§춬⬸﹘§⬸§﹘裔 ⬸ð 뀐﹘⬸×ŰݧⷌnĴ祜ö§Ş⊰⊰⬸§⬸§Űî§ § ⊰裔§⬸ § ﹘﹘§ §§ §⊰ ﹘§﹘§締§裔⬸蟠⊰§﹘§ ﹘§蟠⊰⬸裔§﹘§䀔蟠﹘§⬸§﹘§蟠⊰⬸§§ §  ⊰§⊰ ﹘§⬸§ⷌĐĀ祜ö§ﶼ裔§Ű§ ⬸§뀐⬸§ 裔 ⬸§⊰ ﹘§ ⊰裔§×Ű♌ŤÝî§ § ⊰§⊰ ﹘§⬸ð §裔§§締§ⷌĐĆ祜§

§

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î§ §

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莸 § ã

§裔§﹘§ ⊰§⬸﹘§§締§

§

§

(

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= + + Y - Y +

+ + Y - Y + + Y - Y

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(

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㘬 䀔 §裔§ §蟠§§⬸﹘î§Ť§裔§

Ť⬸뀐﹘§⊰⬸裔﹘î§Yn§裔§ §⬸⬸뀐§⬸﹘§⬸ § §⊰ ﹘ð

§﹘﹘§﹘§삐§裔§ §裔⊰⬸§뀐蟠締§⬸§⊰⬸⊰﹘ð ⬸ö§Ş§⬸﹘§⬸§﹘裔 ⬸뀐﹘⬸î§ § ⊰§ ⊰ ﹘§⬸§﹘締§⊰﹘﹘⊰﹘⊰§裔§§﹘裔§ⷌĖ祜§

§

§ = =

Y Y - Y

ã

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Ć n

삐 斜

斜

§ §

§

§§裔§ §⬸﹘§⊰ ﹘§§蟠§﹘﹘§⬸ §裔⊰⬸§ ⊰ ﹘ö§

♌§﹘§裔 ⬸§⊰ ﹘§⊰î§ 裔 ⬸§⬸﹘§裔§﹘§ 蟠⊰⬸§⬸ §﹘§﹘裔§⬸§⊰ ﹘§⬸﹘ö§× ݧ 裔 ð ⬸§⬸﹘§ 裔裔⬸§⊰﹘§§莸§﹘裔§

§

(

)

é ì - ü ù

í ý

ê î þ ú

ê ú

= + +

-ì ü

ê + ú

í ý

ê î þú

ë û -ì ü í ý î þ

+ ü

í ý î þ Ć n × Ý n Ć × Ý n × Ý

× Ý n

× Ý n Ờ� Ờ� § §

§ ♌⬸§§=§㔤♄Ờ×Ý×§§Ý裔î§ § §

♌⬸ §Ā§Ć§§××⬸莸ݧ§Δ×ÝÝö§ § §

莸 §♌⬸§=§²⬸§裔﹘§⊰蟠²ö§♌⬸ §=§²⬸ §裔﹘§⊰蟠²ö§ ×⬸莸ݧ 裔§﹘﹘§⊰蟠§⬸⊰締§﹘§⬸莸§斜§ ﹘§ Δ×ݧ裔§§蟠⊰⬸ö§

斜蟠裔§ 裔 ⬸§裔⬸ĺ§

§

§ e

e

-@×ĢĀĀ ÝĆ+ 裔×Ć Ý ×

î§ §

§

莸 §§

§

§ = = çæ e y ö÷

èn ø

裔

裔

⬸ 莸

§ § § e e @ æ ö + ç ÷ è ø Đ n Ć

裔

î§ § §

裔§=§﹘﹘§⊰蟠§⬸⊰締§﹘§ §裔⬸蟠⊰î§²²§裔§ § 莸 î§e⬸ §﹘§⬸ §﹘§﹘§⬸ §뀐締§﹘§ ⊰㘬ð 裔裔î§裔⊰締ö§Ş§ §裔締뀐⬸裔§ ﹘§ §蟠裔蟠﹘§裔ð  ⊰﹘⊰§﹘裔§ⷌĜ祜ö§

§

2.4 Propagation delay §

♌§⬸蟠§﹘﹘締裔裔î§莸§莸§⊰﹘⊰蟠﹘§ §⬸﹘﹘⬸§ ﹘締§⬸ §﹘§♌ö§⬸⬸㘬§﹘§ §  ð⬸ð⬸莸§﹘裔ð ⬸§ ⬸§⬸蟠§ ⬸§ §î§莸§ ⬸⬸莸§ §﹘⊰⬸締§⬸ § §䡠�斜§⊰蟠ð⬸﹘§﹘裔裔⬸§⊰ ﹘﹘⊰裔⊰ö§

§⬸﹘§⊰﹘﹘⊰﹘⊰§♄§⊰⬸裔裔裔§⬸ §莸⬸§뀐﹘⬸§⊰⬸뀐ð ⬸裔ö§

1. §⬸﹘﹘⊰﹘﹘⊰﹘⊰♄Ờ§ ﹘ §裔 §  §﹘ §⊰﹘ð ﹘⊰﹘⊰§⬸ § §﹘裔裔⬸裔§§§締§ §ö§

2. ާ﹘﹘裔⊰⊰﹘﹘⊰﹘⊰♄§ ﹘§裔蟠裔§ ⬸뀐§ § ﹘§ 蟠裔⬸裔§⬸ § §§§﹘§ §莸§ ⬸§ §﹘裔§§ö§

㔤§﹘§ §﹘蟠裔§⬸ §♄Ờ§﹘§♄§⬸§⬸﹘§ §⬸﹘§ ⬸﹘§ ⊰﹘﹘⊰﹘⊰§♄ö§ 斜蟠裔蟠§♄Ờ§è§♄§ ⬸§♄莸§ § §﹘蟠§⬸ §§⬸§§﹘§§﹘裔⬸§ⷌĐn祜§

§

+ =

- n

× Ý ú n

ú n× Ý

î§§

+ =

- n

× Ý ú n

ú n× Ý

§

§

§﹘﹘§⬸﹘﹘⬸§﹘締§⊰﹘§§裔뀐﹘§

締§﹘﹘§ §﹘裔⬸§뀐裔§﹘裔§裔 ⬸莸§§

§

§=§×§è§Ýúnö§ §

2.5 Power dissipation §

♌§﹘§♌î§⬸莸§裔裔﹘⬸§ ﹘裔§ §⊰⬸뀐⬸ð ĺ§㘬§Ű締﹘뀐⊰§⬸莸§裔裔﹘⬸î§裔 ⬸§⊰⊰蟠§ ⬸莸§裔裔﹘⬸§﹘§裔﹘⊰§⬸莸§裔裔﹘⬸§×﹘㘬﹘§ ﹘§裔蟠ð 裔 ⬸§﹘㘬﹘Ýö§㔤 § §§裔§§  §⬸ §裔§裔﹘§裔﹘§×�§⬸§�ݧ §裔§⬸締§裔﹘ð ⊰§⬸莸§裔裔﹘⬸§莸 ⊰ §裔§⊰⬸蟠裔§裔裔§ ﹘§n§ŧ ⬸ § §⬸﹘§⬸莸§裔裔﹘⬸§⬸ § §§ⷌĐĐ祜ö§ § 締﹘뀐⊰§⬸莸§裔裔﹘⬸§×莸 ⊰ §裔§ §뀐⬸裔§裔 ð ⊰﹘§⊰⬸蟠⬸§⬸ §⬸莸§裔裔﹘⬸ݧ⬸⊰⊰蟠§蟠§ ⊰ ﹘§⬸ §裔﹘§×�§⬸§�§⬸§�§⬸§�Ýö§ §裔 ⬸§ ⊰⊰蟠§⬸莸§裔裔﹘⬸§裔§⬸§⊰締§﹘§⬸§♌ð î§﹘ §§⬸⊰⊰蟠裔§蟠§⬸§⬸§﹘§蟠§⬸§⬸蟠蟠§ 裔﹘§莸 § §⬸裔§﹘§ ﹘§뀐裔§ⷌĐn祜ö§⊰§莸§ ﹘§⊰⬸⬸﹘§§⬸蟠§⊰﹘⊰蟠﹘⬸§締﹘뀐⊰§﹘§裔﹘⊰§ 裔裔﹘⬸§⬸締§﹘§⬸§ §裔 ⬸§⊰⊰蟠§⬸莸§ 裔裔﹘⬸§ⷌĐĖðĐĢ祜ö§

㔤 §Ű締﹘뀐⊰§⬸莸§裔裔﹘⬸ĺ§

§ §

(

)

n Ā n Ć ö

⬸蟠

⬸蟠 �삐

⬸蟠

⬸蟠 �삐

é æ ö

= ê ç- ÷ +

è ø

ë

ù

æ ö

+ - ç ÷ ú

è ø û

ò

ò

§ §

§

斜﹘⊰§⬸莸§⬸§﹘㘬﹘§⬸莸ĺ§

§

é ù

-é ù æ ö

= ê úê - ç ÷ú

ê ú

ë ûë è øû

Ť

Ť Ť

× Ý

裔 Ć 

㘬

(4)

§ ĀnĀnĐð˧

3. RESULT AND DISCUSSION §

⬸§裔蟠締§ §﹘﹘﹘裔§⬸ §斜�§⊰§§﹘§斜�♌§ ﹘§Ū䡠�斜§⬸⊰§⊰⊰蟠î§斜�§﹘裔§§⊰⊰蟠§裔§ 裔蟠§締§⬸§ §﹘﹘締⊰﹘§뀐⬸§⬸ §斜�§ð ⊰ö§♌§ §裔§莸⬸㘬§î§ § ⊰裔裔§⬸ §蟠﹘§뀐﹘ð ﹘§﹘§ ﹘裔§§﹘§⬸§ §斜�§䡠�斜Ŷ§ 裔蟠⊰蟠§﹘§ § ﹘蟠裔§裔 ⬸莸§締§ §⬸⬸裔§ 裔蟠⊰蟠§ ﹘§§ ﹘뀐§締§ § 裔§뀐§ð ⬸§﹘§nۧ﹘﹘締⊰﹘§뀐⬸§﹘§§裔§ § ﹘§ § 裔蟠§⬸﹘§ ⬸뀐§ §⬸⬸裔§뀐⬸§﹘§莸§ 莸 § §䡠ŶŰ♌Ū♌§裔뀐蟠﹘⬸§裔蟠裔ö§♌§﹘裔⬸§뀐 ﹘ð 裔§ ﹘§ §⬸⬸裔§裔蟠⊰蟠§﹘裔§⬸§蟠⊰§ 斜ŪŶ裔î§﹘裔§ §裔蟠 ﹘⊰§⬸﹘§⬸ §裔 ⬸莸裔§﹘§裔§﹘§ § ﹘⊰§⬸ § §莸⬸§뀐﹘§莸 ⊰ §蟠⊰§﹘§⊰⬸ð 蟠⊰﹘⊰§﹘§Ű♌Ťö§ §⬸莸§⊰⬸裔蟠뀐⬸§⬸ §斜�§ ﹘裔 § §裔 § ⬸蟠 §⬸ § §ĜönĢ §Å §⬸莸 § ﹘ §斜�♌ § ﹘裔§§﹘§ĐĖöĀĮ§Å§⬸莸§ ﹘§Ū�䡠斜§ö§ §裔﹘§﹘裔뀐裔裔⬸§뀐§裔§ĜönĨ§Å§裔裔§ ﹘§斜�♌§ ﹘裔 § §﹘ §ĐĖönĀ §Å §裔裔 § ﹘ §Ū䡠�斜ö §⬸﹘ §⊰﹘ð ﹘⊰﹘⊰§裔§ §﹘裔§ ⬸§斜�§﹘裔§§﹘뀐⬸§ § §裔뀐﹘§§⊰⊰蟠裔ö§

§

Fig. 4 – ð§Ū蟠§ ⬸§ §§

§

ö§Ė§裔裔§ §♌ð斜§⊰ ﹘﹘⊰裔⊰裔§⬸ §斜�§ 䡠�斜Ŷ裔 § ﹘裔 § ⬸ § ⬸蟠裔 §⊰﹘⊰蟠﹘⬸裔 § ﹘ § 斜�♌ § 䡠�斜Ŷ裔§﹘§⬸⬸뀐§뀐﹘蟠§ ⬸§﹘§﹘§⬸﹘§ ﹘§Ā§⬸§n§⬸ö§Ş§裔 ⊰﹘§﹘§⊰蟠§ ﹘⊰ð 뀐§§斜�§䡠�斜Ŷ裔§裔§⬸裔§⊰⬸뀐﹘§⬸§蟠㘬§ 䡠�斜Ŷ裔§裔§⬸裔§莸 ⊰ §﹘ ⊰裔§ §⊰⊰蟠§ ⊰ð ⊰締§§Ū䡠�斜§⬸⊰§⊰ 䀔蟠裔ö§

§裔莸⊰ §Ū ﹘﹘⊰裔⊰裔§ ⬸§﹘§斜�§﹘裔裔§ð §×ö§Ćݧ﹘§⊰§§ö§Ĝö§♌§﹘﹘裔§ ﹘§ 斜�§﹘裔§§裔§ ﹘裔§ ﹘§Ū䡠�斜§§§﹘§ 斜�♌§ö§

ö§Ģ§§裔 ⬸莸裔§ §﹘﹘⬸§⬸ §⬸莸§裔裔﹘⬸§莸 § 䀔蟠⊰締§⬸ § §蟠§裔﹘ö§♌§﹘﹘裔§ ﹘§ §⬸莸§ 裔裔﹘⬸§裔§⬸莸§ ⬸§斜�§﹘裔§§⊰⬸뀐﹘§⬸§ Ū䡠�斜§§﹘§斜�♌§ö§♌§⬸§⬸§裔﹘裔 § §  ⬸뀐﹘⊰§裔蟠뀐﹘⊰締§⬸ § §裔§斜�§﹘裔§§ ﹘§﹘§Ć§裔§⬸§⊰§﹘⬸蟠裔§﹘﹘뀐裔ö§締⊰﹘§ ﹘﹘뀐裔§蟠裔§ ⬸§裔蟠⊰ § ⬸뀐﹘⊰§⊰⬸뀐﹘裔⬸§﹘ĺ§ §=§Ć§뀐⊰⬸§뀐î§§=§Ćn§﹘⬸§뀐î§♄⬸ §=§ĖĖöĖĜ§﹘ö§§

斜뀐﹘締§﹘§Ť﹘§⊰ ﹘§裔§﹘裔⬸§§§ö§Ĩ§⬸§裔蟠ð ﹘§ § ⬸뀐﹘⊰§﹘﹘⬸§⬸ § ⊰蟠§⊰裔§﹘§ §﹘裔§⬸§ ⬸裔§⊰裔ö§

§

§

§

§

Fig. 5 – 斜뀐蟠﹘裔§ §裔莸⊰ §⊰ ﹘﹘⊰裔⊰裔§ ⬸§ §斜�ð ﹘裔§§

§

§

§

Fig. 6 – 䀔蟠⊰締§裔⬸裔§⬸ §裔§

§

§

§

Fig. 7 –§Ť﹘§⊰ ﹘§裔 ⬸莸§⬸莸§裔裔﹘⬸§﹘§⬸﹘﹘⬸§

Ű﹘締§ ⬸§﹘⬸蟠裔§締裔§⬸ §§

§

Table 1 –§Ū﹘⊰蟠﹘§ú裔뀐蟠﹘§﹘﹘뀐裔§ ⬸§§莸 §

 §⊰§裔蟠⊰蟠§裔⊰ 뀐§

§

Ű⊰§ 裔 ⬸§ ⬸﹘§

×ݧ

⬸莸§ð ⊰﹘﹘ð⬸§

ƧỜ § 䀔蟠⊰締§ ×뀐⊰⬸§莸﹘ݧ

⬸﹘ð ﹘⬸§

﹘締§ ×⊰⬸§裔⊰ݧ

⬸﹘§⊰﹘﹘⊰ð ﹘⊰§

× Ý§

䡠�斜§ ĀönĜĀЧ ĆĖĀöĴƧ ĐöĜĐĜ§ nöĮĢĜ§´§Ć§§Ĵ§

斜�♌§ ĀöĆĴņ ĆĆĀöĢn§ nöĨĨЧ nönĆĴ§´§Ć§§Ĵ§

(5)

§

§ ĀnĀnĐðĜ§

Table 2 –§⬸莸§裔裔﹘⬸§﹘§⬸﹘﹘⬸§﹘締§⬸ §§

⬸§﹘⬸蟠裔§⊰§﹘﹘뀐§

§

Ű⊰§ § §©§Ć§ Ƨ´§ĆĀnƧ

§

§©§Ĝ§ ĐЧ´§Ć§§Ĵ§

§

⬸ §©§§ nöĜ§§ĮöĜ§´§Ć§§Ĵ§

裔§©§Đ§ Ĵ§´§Ć§§Ĵ§

§

䡠�斜§ ⬸莸§ ×뀐㔤ݧ

ĜĴĢöĢƧ §ĢĀĀöĆĴ§

ĨĜĮöĮƧ §ĨnĮöĆn§

nĢĖöĆ˧ §nĢĢöĐЧ

ĢĆĀön˧ §ĢĆĖöĆЧ Ű﹘締§

×斜ݧ

nönĆЧ §nön§

nöĢĢĜ§ §nĨĨĨ§

ĀöĴĮ˧ §ĀöĴĨ̧

nöĐĀЧ §nönĮĮ§ 斜�♌§ ⬸莸§

×뀐㔤ݧ

ĖĴnöĆЧ §ĖĴĖöĢЧ

ĜĴnöĀƧ §ĜĨĀöĢ˧

nĢĨöĮЧ §nĢĴöĜЧ

ĖĮĀö̧ §ĖĮnöĴЧ Ű﹘締§

×斜ݧ

ĆöĨĢƧ §ĆöĨĜn§

ĆöĴĴ§ §nöĀĢĜ§

ĀöĴĜĜ§ §ĀöĴĖĴ§

ĆöĨĐƧ §ĆöĨnn§ 斜�§ ⬸莸§

×뀐㔤ݧ

ĖĢĴöĨĮ§ §ĖĨĆöĴn§

ĜĴnöĖĜ§ §ĜĨĖöĆĜ§

nĢĜöĆƧ §nĢĮöĀ˧

ĖĨĮöĀĴ§ §ĖĮĀöĮƧ Ű﹘締§

×斜ݧ §

ĆöĢĨ§ §ĆöĢĢn§

nöĀĆĴ§ §nöĀĮ˧

ĀöĴĐĮ§ §ĀöĴnĮ§

ĆöĨĆ˧ §ĆöĨĀ˧ §

4. CONCLUSION §

♌§ §裔§莸⬸㘬§莸§ ﹘§蟠裔§⬸蟠§﹘﹘締⊰﹘§뀐⬸§ ⬸§斜�§䡠�斜Ŷ§﹘§裔 ⬸莸§裔§裔蟠뀐﹘⊰締§⬸§⬸ § ⊰§㘬§斜�♌§﹘§Ū䡠�斜§⊰裔ö§㔤§ ﹘§뀐⬸締§

⬸§斜�§뀐⬸§⬸§﹘§﹘§§﹘§裔蟠§

Table 3 –§Ū⬸뀐﹘﹘§裔蟠締§⬸ §裔裔﹘⬸î§﹘締î§⊰﹘﹘⊰﹘⊰§

裔⊰§⬸§斜�§﹘裔§§

§

Ű⊰§ ⬸莸§Ű裔裔﹘ð ⬸§×䡠⊰⬸§

㔤﹘ݧ

⬸﹘﹘⬸§ Ű﹘締§×⊰⬸§

裔⊰ݧ

⬸﹘§Ū﹘﹘⊰ð ﹘⊰§×ݧ 斜�§ ĆĀĜöĀĴ§§ nöĢĐ˧§ nöĆĀ˧´§Ć§§Ĵ§

斜�♌§ Ĝöņŧ§䡠⬸§ ﹘§斜�§

ĜönĨ§Å§䡠⬸§ ﹘§斜�§

ĜöȨ̇ŧ䡠⬸§ ﹘§斜�§ 䡠�斜§ ĐĖöĀĮ§Å§§

䡠⬸§ ﹘§ 斜�§

ĐĖön§ŧ䡠⬸§ ﹘§斜�§

ĐĢöḈŧ§ 䡠⬸§ ﹘§斜�§

§

裔§ ⬸뀐﹘⊰§莸 §斜�♌úŪ䡠�斜§ö§ §뀐﹘⊰§ ⬸ §蟠⊰ §斜ŪŶ裔 §⬸ §  § ⬸뀐﹘⊰ §⬸ §ĆnĀ §뀐 §斜� § 䡠�斜Ŷ裔§⊰⊰蟠裔§裔§裔﹘§ §蟠裔§ §ð ⬸§﹘﹘締⊰﹘§뀐⬸§⬸ §斜�§䡠�斜Ŷ裔§⊰裔ö§斜ð  ⊰﹘§ ﹘⊰뀐§§ §⊰⊰蟠§ ⬸뀐﹘⊰§裔§ð ⊰§ ⬸§斜�§﹘裔§⊰⊰蟠§ 締§⬸ §뀐⬸§﹘ð ﹘﹘裔§ ⬸§⬸莸§⬸莸§斜♌§⊰⊰蟠ö§

§

ACKNOWLEDGEMENT §

Űö§斜蟠§㫴蟠뀐﹘§斜﹘㘬﹘§斜﹘㘬﹘§ ﹘㘬 蟠締§﹘⊰㘬⬸莸ð 裔§ ⬸§ ﹘⊰﹘§裔蟠⬸§⬸﹘§ ⬸뀐§斜�§ŰŰ�ö§

REFERENCES §

Ćö ᘈöðŤö§㫴뀐î§��䡠§11î§ĴЧ×nĀĆĀÝö§

nö ö§﹘﹘締î§Şö§Ū ﹘﹘㘬﹘裔﹘î§Ťö§㘬⬸⊰î§﹘♌﹘

♄⊰蟠裔삐裔裔⊰î§斜⊰⬸�⬸î§ ×⊰§

﹘ĺ§ĆĴĴĢÝö§

Đö ö§î§斜ö§䡠⬸ ﹘締î§斜ö§Ū裔⬸⬸﹘蟠î§ö§斜㘬⬸⊰㘬î§♌��� �⊰§51î§n˧×nĀĀĖÝö§

Ėö 斜蟠§ 㫴蟠뀐﹘§ 斜﹘㘬﹘î§ 斜﹘⬸締§ Űî§ ö§Ť﹘裔﹘﹘§ 斜 î§ Ű﹘§ Ű﹘裔î§䡠﹘斜⊰삐♌﹘⬸蟠﹘§7î§♌裔裔蟠§Ć§ ×nĀĆĆÝö§

Ĝö 斜﹘⬸締§Űî§ö§Ť﹘裔﹘﹘§斜 î§Ű﹘§Ű﹘裔î§Şö㫴ö§Űî§斜蟠§ 㫴蟠뀐﹘§斜﹘㘬﹘î§♌�⊰⬸§98î§ĆĖĢĜ§×nĀĆĆÝö§

Ģö 㫴ö§⬸締î§ 斜ö§䡠蟠㘬 ⬸﹘ 締﹘締î§ ö§䡠﹘ 뀐⬸⬸ð䡠뀐﹘î§ ♌���§91î§ĐĀĜ§×nĀĀĐÝö§

Ĩö 斜﹘﹘裔§Ờ ⬸裔 î§㫴 ⬸뀐﹘뀐§⬸裔⬸§斜 î§斜﹘﹘締§Űî§ 斜蟠§㫴蟠뀐﹘§斜﹘㘬﹘î§﹘⬸䠰�⊰⬸ 締裔§3§⬸§Ćî§ĜĢĴ§ ×nĀĆĆÝö§

Įö 㫴ö§⬸締î§ 斜öŪö§﹘裔﹘î§⬸莸䠰⬸莸♄䡠�斜斜♌♄⊰蟠䠰 裔§×莸§ᘈ⬸㘬ĺ§㔤締ĺ§nĀĀĀÝö§

Ĵö Şö§﹘﹘ð裔 î§öŪö§蟠뀐î§♌���♄⬸뀐蟠삐§13î§ ĆnĨƧ×ĆĴĴĖÝö§

ĆĀö斜﹘⬸締§Űî§ö§Ť﹘裔﹘﹘§斜 î§斜蟠§㫴蟠뀐﹘§斜﹘㘬﹘î§� 䠰 斜締裔삐§38î§ĆnĴĴĴ§×nĀĆĆÝö§

ĆĆö斜ö§Ű蟠﹘î§ 斜ö斜ö䡠ö§斜 î§ 斜öö§蟠裔㘬締î§♌��� 斜⬸䠰斜 ♄⊰§30î§ĮĢ˧×ĆĴĴĜÝö§

Ćnöö§斜﹘㘬蟠﹘î§ Şöö§莸⬸î§♌���斜⬸䠰斜♄⊰§25î§ĜĮ˧ ×ĆĴĴĀÝö§

ĆĐöỜö§뀐§ ﹘§ § ﹘öî§�⊰⬸⊰裔䡠î§ĜĜ§ ×♌ŶŰ䡠§ ⊰ ⊰﹘§Ű裔ö§♌﹘⬸﹘î§ĆĴĴĴ§Ý§

ĆĖö㫴ö�ö§裔⬸î§♌���斜⬸䠰斜♄⊰§29î§ĢȨ̇×ĆĴĴĖÝö§ ĆĜö䡠ö§斜 ⬸î§♄䡠�斜﹘♄⊰蟠⊰ ⬸⬸締♄ ﹘裔§

×⊰§﹘ĺ§ĆĴĮĮÝö§

ĆĢö䡠ö§﹘裔î§ö§䡠﹘蟠î§ö§斜 ﹘î§Şö§斜﹘⬸î§斜ö§䡠⬸ ﹘締î§ Şö§斜⬸蟠 î§♌���﹘⬸⊰ ⬸§10î§ĖĀn§×nĀĆĆÝö§

ĆĨööö§⬸裔裔⬸î§ ö§斜蟠﹘î§♌���♄⊰蟠裔䠰♌§ 51î§ĆĐĀƧ ×nĀĀĖÝö§

ĆĮöŞö§﹘﹘ð裔 î§ öŪö§蟠뀐î§♌���﹘裔♄⬸뀐蟠삐 §13î§ĆnĨƧ×ĆĴĴĖÝö§

ĆĴöö§㫴﹘莸﹘蟠﹘î§ ö§斜﹘㘬﹘뀐⬸⬸î§ ö§Ť﹘﹘î§ ᘈö§�⊰ ﹘î§ ö§蟠﹘î§ ö§斜⬸î§♌����⊰§47î§ĮĢ̂×nĀĀĀÝö§

nĀö ö§î§斜ö§䡠⬸ ﹘締î§斜ö§Ū裔⬸⬸﹘蟠î§ö§斜㘬⬸⊰㘬î§♌��� �⊰§51î§n˧×nĀĀĖÝö§

nĆö ö§㫴ö§斜﹘ 蟠î§Şö§㫴ö§Ť裔莸﹘裔î§Ūö§㫴ö§♌⬸ ♌ ⬸뀐﹘⬸﹘

⊰⬸뀐蟠斜⊰⊰§7§⬸Ćî§Ĝ˧×nĀĀĖö§

nnö ö§Ŷ裔î§ Ūö§﹘î§ Ūö§﹘締﹘蟠î§ 斜ö§Ū裔⬸⬸﹘蟠î§斜⬸ 斜﹘�⊰⬸§46îĐĨЧ×nĀĀnÝö§

nĐö Şö§⬸낈î§Ờö§㫴﹘蟠î§斜⬸斜﹘�⊰⬸§44î§ĨĨĜ§×nĀĀĀÝö§ nĖö 㫴ö§斜 § 㫴蟠뀐﹘î§ 斜﹘﹘裔§ Ờ ⬸裔 î§ Ş蟠§ 斜﹘㘬﹘î§

斜ö§Ť ﹘﹘⊰ ﹘締﹘î§斜蟠§㫴蟠뀐﹘§斜﹘㘬﹘î§삐䡠⊰ 䡠﹘§ 110-116î§ĜĆĜ§×nĀĆĆÝö§

nĜö 斜﹘⬸締§Űî§§Ť﹘裔﹘﹘§斜 î§⬸ ﹘§䡠蟠㘬 î§斜蟠§ 㫴蟠뀐﹘§斜﹘㘬﹘§춬ާ斜뀐§Ū⬸뀐﹘⊰§Ş﹘締⊰﹘§䡠⬸§⬸§

 ⬸뀐﹘⊰§Ş﹘締裔裔§� §斜�§䡠�斜Ŷ§㔤⬸⬸蟠﹘⬸

♄⬸裔䡠﹘ 締裔⊰裔斜⊰ ⊰裔﹘⊰ §

nĢö ö§斜㘬⬸⊰㘬î§ Ờö§䡠⊰㘬î§ ö§⬸î§♌����⊰ §9î§ĆĀĴ§×ĆĴĮĮÝö§

nĨö 㫴ö§Ť﹘î§ Şö§Ť⬸莸î§ ⬸締⬸ 뀐⬸⊰⬸⊰裔뀐䠰

⊰⬸蟠⊰⬸⊰裔î§×莸§ᘈ⬸㘬ĺ§⬸ §㔤締§Ë§斜⬸裔§♌⊰öĺ§

nĀĀnÝö§

nĮö ö§Ŷ裔î§ 斜ö§Ū裔⬸⬸﹘蟠î§⬸⊰♌���♌斜�♌♄⬸ öî§ĐĮ§ ×ĆĴĴĴÝö§

nĴö䡠öðŪ ö§蟠›§ 斜 öðö§﹘î§♌���§�⊰§45î§ĨĴĨ§ ×ĆĴĴĮÝö§

ĐĀö㫴ö㫴ö§ᘈ⬸蟠î§♌����⊰§36î§ĐĴĴ§×ĆĴĮĴÝö§

ĐĆööðö§蟠î§ Ūö§蟠î§ öðö§蟠﹘î§ öðᘈö§Ū ﹘î§ 䡠öðŪö§î§ ö㫴ö§㫴⬸î§ᘈöŪö§Ū î§♌����⊰§ĖĀî§Į̧×ĆĴĴĐÝö§ Đnö﹘﹘締î§﹘﹘⊰⊰蟠ö§♄ ﹘î§ ﹘§ ĆĖ˧

䡠⬸﹘締î§斜뀐§Ģî§ĆĴĴĴö§

ĐĐö♄䡠�斜⬸莸♄⬸裔蟠뀐⬸﹘♄♄﹘⊰蟠﹘⬸§ × ﹘裔§

♌裔蟠뀐裔§♌⊰ö›§ĆĴĴĨÝö§

ĐĖö ö§斜⊰ 蟠î§ Ū ö§﹘⊰ ﹘î§ ö§裔⊰ î§♌��� ♌﹘⬸﹘ 斜�♌ ♄⬸ ⊰î§ĆĨ̧×nĀĀnÝö§

ĐĜöŞöŤö§Ť ﹘﹘⊰ ﹘締締﹘î§ 斜 蟠§ ﶼ뀐﹘î§♌﹘⬸﹘♄⬸䠰 ⊰⬸斜♌裔î§nĀĨ§×斜♌ŰúŞ斜ðŰŞŪĺ§Ť﹘﹘⬸ĺ§ ♌﹘ĺ§nĀĀnÝö§

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